納米技術中的顯微學手冊

納米技術中的顯微學手冊

teraction teraction Microan

基本信息

作 者:姚楠,王中林 主編
出 版 社:清華大學出版社
出版時間:2005-9-1
版 次:1頁 數:396字 數:633000 印刷時間:2005-9-1開 本:紙 張:膠版紙 印 次:I S B N:9787302097587包 裝:精裝

內容簡介

現代顯微學在納米技術領域的研究和發展中起到“眼睛”和“手”的功能。迄今,人們仍在孜孜不倦地尋找納米尺度上的“火眼金睛”。本手冊的目的在於提供關於各種顯微學的原理及其在該迅猛發展的領域內套用的綜述參考書。本手冊共有22個專題,每一專題都由不同研究領域的、處於世界前沿的科學家撰寫。本書是第2卷,敘述的是電子顯微學的內容,共有12個專題。本書力圖使讀者對所敘述的方法有一個概念上的理解,而不是只停留在對理論的堆砌上。在每一個專題里,都會敘述相關的實例及其套用並加以討論,使讀者對電子顯微技術能明了和理解;還會進一步展示各章之間的內在聯繫,表明每一種技術如何在綜合性的、複雜的測試中各自扮演獨特的角色,解決具體的問題。

目錄

List of Contributors
1 High\|Resolution Scanning Electron Microscopy
1.1 Introduction: Scanning Electron Microscopy
and Nanotechnology
1.2 Electron\|Specimen Interactions5
1.2.1 Electron\|Specimen Interactions in Homogeneous Materials
1.2.2 Electron\|Speciment Interactions in Composite Samples
1.3 Instrumentation of/the Scanning Electron Microscope
1.3.1 General Description
1.3.2 Performance of a Scanning Electron Microscope
1.4 The Resolution of Secondary and Backscattered Electron Images
1.5 Contrast Mechanisms of SE and BE Images of Nanoparticles
and Other Systems
1.5.1 Small Particle Contrast in High\|Resolution BE Images
1.5.2 Small Particle Contrast in High\|Resolution SE Images
1.5.3 Other Contrast Mechanisms
1.6 Applications to Characterizing Nanophase Materials
1.7 Summary and Perspectives
References
2 High Spatial Resolution Quantitative Electron Beam
Microanalysis for Nanoscale Materials
2.1 Introduction
2.2 The Nanomaterials Characterization Challenge: Bulk Nanostructures
and Discrete Nanoparticles
2.2.1 Bulk Nanostructures
2.2.2 Nanoparticles
2.3 Physical Basis of the Electron\|Excited Analytical Spectrometries
2.4 Nanoscale Elemental Characterization with High Electron Beam Energy
2.4.1 Eels
2.4.2 X\|ray Spectrometry
2.5 Nanoscale Elemental Characterization with Low and Intermediate Electron Beam Energy
2.5.1 Intermediate Beam Energy X\|ray Microanalysis
2.5.2 Low Beam Energy X\|ray Microanalysis: Bulk Nanostructures
2.5.3 auger Spectrometry
2.5.4 Elemental Mapping
2.6 Examples of Applications to Nanoscale Materials
2.6.1 Analytical Electron Microscopy
2.6.2 Low Voltage SEM
2.6.3 Auger/X\|ray SEM
2.7 Conclusions
References
3 Characterization of Nano\|Crystalline Materials Using Electron
Backscatter Diffraction in the Scanning Electron Microscope
3.1 Introduction
3.2 Historical Development of EBSD
3.3 Origin of EBSD Patterns
3.3.1 Collection of EBSD Patterns
3.3.2 Automated Orientation Mapping
3.4 Resolution of EBSD
3.4.1 Lateral Resolution
3.4.2 Depth Resolution
3.5 Sample Preparation of Nano\|Materials for EBSD
3.6 Applications of EBSD to Nano\|Materials
3.6.1 Heteroepitaxy of Boron Arsenide on \[0001\] 6H\|Sic
3.6.2 Electrodeposited Ni for MEMS Applications
3.6.3 polycrystalline Si For MEMS Applications
3.7 Summary
References
4 High Resolution Transmission Electron Microscopy
4.1 HRTEM and Nanotechnology
4.2 Principles and Practice of HRTEM
4.2.1 Basis of Image Formation
4.2.2 Definitions of Resolution
4.2.3 Lattice Imaging or Atomic Imaging
4.2.4 Instrumental Parameters
4.2.5 Further Requirements
4.2.6 Milestones
4.3 Applications of HRTEM
4.3.1 Semiconductors
……
5 Scanning Transmission Electron Microscopy
6 In\|situ Electron Microscopy for Nanomeasurements
7 Environmental Transmission Electron Microscopy in Nanotechnology
8 Electron Nanocrystallography
9 Tomography Using the Transmission Electron Microscope
10 Off\|Axis Electron holography
11 Sub\|nm Spatially Resolved EELS(Electron Energy\|Loss Spectroscopy):
Methods,Theory and Applications
12 Imaging Magnetic Structures Using TEM
Index

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