王照奎

ation silan ation

基本信息

個人簡介

王照奎,1980 年 8 月生,河南鄧州人,汕頭大學物理系材料物理與化學專業碩士研究生畢業,現任河南師範大學物理與信息工程學院光電教研室教師。

主要從事低價長壽命多晶矽薄膜太陽能電池的研究工作,具體方向為 PECVD 法沉積薄膜過程中的線上質譜檢測及沉積機理分析,在 Int. J. Mass Spectrom. 、 J. Phys. D: Appl. Phys. 、 Chin. Phys. Lett. 、 Chin. Phys. 等國內外期刊上以第 1 作者發表論文 10 余篇,其中 6 篇被 SCI 收錄。

發表論文

1. Wang Zhao-Kui, Lou Yan-Hui, Lin Kui-Xun, Lin Xuan-ying, A new method of measuring neutral radicals by mass spectrometry, International Journal of Mass Spectrometry, 2006, 257 (10) (Impact factor: 2.09)

2. Wang Zhao-Kui, Lou Yan-Hui, Lin Kui-Xun, Lin Xuan-ying, Effects of hydrogen dilution on deposition process of nano-crystalline silicon film by SiCl4/H2 plasma, J. Phys. D: Appl. Phys, 2006, 39, 3030-3035 ( Impact factor: 1.957)

3. Wang Zhao-Kui, Lin Kui-Xun, Lin Xuan-Ying, Effects of flow rate variation on SiCln (n<3) densities in SiCl4 plsams, Chin. Phys. Lett., 2006, 23, 169

4. Wang Zhao-Kui, Lou Yan-Hui, Lin Kui-Xun, Spatial distribution of SiCln (n<3) in SiCl4 plasma measured by mass spectroscopy, Chin. Phys., 2006, 15 (10)

5. Wang Zhao-Kui, Lin Kui-Xun, Lin Xuan-Ying, A new method for measure the spatial distribution of depletion fraction of silane plasma by mass spectrometer, Chin. Phys., 2005, 14(07), 1413-1417

6. Wang Zhao-Kui, Lin Kui-Xun, Lin Xuan-Ying, A movable mass spectroscopy sampling apparatus for measuring spatial distribution of neutral radicals in capacitively coupled silane plasma, Chin. Phys. Lett., 2005, 22(04), 904-906

7. Wang Zhao-Kui, Lin Kui-Xun, Lin Xuan-Ying, Mass spectroscopy measurement of SiCln(n<3) radicalsspatial distribution in SiCl4 plasma, 15TH International photovoltaic science and engineering confernence, 2005, 1166-1167

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